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TM 9-254
9-9.
Coating Optical Components - Continued
KEY to figure 9-30:
1.
Bell jar
2.
SUBSTRATE TEMPERATURE GAUGE
3.
HEATER ADJUST knob
4.
DISCHARGE GAUGE
5.
THERMOCOUPLE GAUGE
6.
THERMOCOUPLE GAUGE switch
7.
THERMOCOUPLE switch
8.
ZERO SET knob
9.
METER READ switch
10.
AUX. PWR (Auxiliary power) switch
11.
HEATER PWR (Heater power) switch
12.
FILAMENT PWR (Filament power) switch
13.
DIFF PUMP (Diffusion pump) switch
14.
MECH PUMP (Mechanical pump) switch
15.
MAIN PWR (Main power) switch
16.
DP WATER (Diffusion pump water) valve
17.
SYS VENT (System vent) valve
18.
BACKING VALVE
19.
ROUGHING VALVE
20.
HIGH VACUUM VALVE
21.
Splatter shield lever
22.
HOIST switch
23.
FILAMENT ADJUST knob
24.
Range selector switch
(8)
Place HOIST switch (22) in the DOWN position to lower bell jar (1) onto the baseplate (5, fig. 9-31).
(9)
Rotate HEATER ADJUST knob (3) to approximately mid-range.
NOTE
Allow mechanical pump a 5 to 10-minute warm-up period after power has been applied.
(10) Set MECH PUMP switch (14) to the ON position and close SYS VENT valve (17).
(11) Place THERMOCOUPLE GAUGE switch (6) to the ON position and THERMOCOUPLE switch (7) to the
TC1 position.
NOTE
THERMOCOUPLE GAUGE (5) should indicate approximately 50 microns before proceeding to next
step.
(12) Rotate BACKING VALVE (18) fully counterclockwise to the open position. This will evacuate the
diffusion pump and the lower vacuum chamber.
NOTE
THERMOCOUPLE GAUGE (5) should indicate approximately 50 microns before proceeding to next
step.
(13) Rotate BACKING VALVE (18) fully clockwise to the closed position. Rotate ROUGHING VALVE (19)
fully counterclockwise to the open position. This will evacuate the bell jar (1).
NOTE
THERMOCOUPLE GAUGE (5) should indicate approximately 50 microns before proceeding to next
step.
(14) Rotate ROUGHING VALVE (19) fully clockwise to the closed position. Rotate BACKING VALVE (18)
fully counterclockwise to the open position.
Change 2 9-30
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